年度	2018
全部作者	蔡春进,Bo-Xi Liao, Neng-Chun Tseng, Ziyi Li, Yingshu Liu, Jen-Kun Chen, Chuen-Jinn Tsai*
论文名称	Exposure Assessment of Process By-product Nanoparticles Released during the Preventive Maintenance of Semiconductor Fabrication Facilities
期刊名称	Journal of Nanoparticle Research
卷数	20 (7)
页码	203-
语言	英文