| Year | 2018 |
|---|---|
| Authors | Chuen-Jinn Tsai ,Bo-Xi Liao, Neng-Chun Tseng, Ziyi Li, Yingshu Liu, Jen-Kun Chen, Chuen-Jinn Tsai* |
| Paper Title | Exposure Assessment of Process By-product Nanoparticles Released during the Preventive Maintenance of Semiconductor Fabrication Facilities |
| Journal Title | Journal of Nanoparticle Research |
| Vol.No | 20 (7) |
| Page(s) | 203- |
| Language | English |
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