| Year | 2012 |
|---|---|
| Authors | Hsun-Ling Bai ,B.-J. Wu, H. Bai*, I-K. Lin, H.-H. Liu |
| Paper Title | Metal Corrosion of Al-Si-Cu Pattern Wafer Due to Airborne Molecular Contaminant of HCl |
| Journal Title | Aerosol and Air Quality Research |
| Vol.No | 12 |
| Issue.No | 1 |
| Page(s) | 104-112 |
| Language | English |
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