Year	2014
Authors	Chuen-Jinn Tsai ,Tzu-Ming Chen, Chuen-Jinn Tsai, Shaw-Yi Yan, Shou-Nan Li
Paper Title	An Efficient Wet Electrostatic Precipitator for Removing Particle and Nanoparticles in Semiconductor Manufacturing Processes
Journal Title	Separation and Purification Technology
Vol.No	136
Page(s)	27-35
Date of Publication	2014-11-01
Language	Chinese