| Year | 2010 |
|---|---|
| Authors | Hsun-Ling Bai ,B.-J. Wu, H. Bai*, I-K. Lin, S.S. Liu |
| Paper Title | Al-Cu Pattern Wafer Study on Metal Corrosion Due to Chloride Ion Contaminants |
| Journal Title | IEEE Transactions on Semiconductor Manufacturing |
| Vol.No | 23 |
| Issue.No | 4 |
| Page(s) | 553-558 |
| Language | Chinese |
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